Fabrication process for superconducting digital circuits
نویسندگان
چکیده
منابع مشابه
Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
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ژورنال
عنوان ژورنال: IEICE Transactions on Electronics
سال: 2021
ISSN: 0916-8524,1745-1353
DOI: 10.1587/transele.2020sui0002